Brongo, Maureen R.: search on Z-Library

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1

Mechanical property measurement of thin polymeric-low dielectric-constant films using bulge testing method

Zheng, D. W., Xu, Y. H., Tsai, Y. P., Tu, K. N., Patterson, P., Zhao, Bin, Liu, Q.-Z., Brongo, Maureen

Journal:

Applied Physics Letters

Year:

2000

Language:

english

File:

PDF, 387 KB

english, 2000

2

Dielectric property and microstructure of a porous polymer material with ultralow dielectric constant

Xu, Yuhuan, Tsai, Yi-pin, Tu, K. N., Zhao, Bin, Liu, Q.-Z., Brongo, Maureen, Sheng, George T. T., Tung, C. H.

Journal:

Applied Physics Letters

Year:

1999

Language:

english

File:

PDF, 470 KB

english, 1999

3

Integration of Low Dielectric Constant Materials in Advanced Aluminum and Copper Interconnects

Zhao, Bin, Brongo, Maureen

Journal:

MRS Proceedings

Year:

1999

Language:

english

File:

PDF, 3.44 MB

english, 1999

4

Measurement of mechanical properties for dense and porous polymer films having a low dielectric constant

Xu, Yuhuan, Tsai, Yipin, Zheng, D. W., Tu, K. N., Wo Ong, Chung, Choy, Chung Loong, Zhao, Bin, Liu, Q.-Z., Brongo, Maureen

Journal:

Journal of Applied Physics

Year:

2000

Language:

english

File:

PDF, 505 KB

english, 2000

5

A New Low Dielectric Constant Polymer Material (k < 2): Microstructure, Electrical Properties, and Mechanical Properties

Tsai, Yi-Pin, Liao, C. N., Xu, Yuhuan, Tu, K. N., Zhao, Bin, Liu, Q.-Z., Brongo, Maureen

Journal:

MRS Proceedings

Year:

1999

Language:

english

File:

PDF, 1.50 MB

english, 1999

6

Integration of Low Dielectric Constant Materials in Advanced Aluminum and Copper Interconnects

Zhao, Bin, Brongo, Maureen

Journal:

MRS Proceedings

Year:

1999

Language:

english

File:

PDF, 2.91 MB

english, 1999

7

SPIE Proceedings [SPIE Microelectronic Manufacturing '99 - Santa Clara, CA (Wednesday 22 September 1999)] Multilevel Interconnect Technology III - ILD thermal stability in deep-submicron technologies: from thin to ultrathin dielectric films

Hsu, David T., Kim, Hyungkun, Shi, Frank G., Zhao, Bin, Brongo, Maureen R., Schilling, P., Wang, Shi-Qing, Graef, Mart, Patel, Divyesh N.

Year:

1999

Language:

english

File:

PDF, 394 KB

english, 1999

8

SPIE Proceedings [SPIE Microelectronic Manufacturing 1996 - Austin, TX (Wednesday 16 October 1996)] Microelectronic Device and Multilevel Interconnection Technology II - Integration of ICP high-density plasma CVD with CMP and its effects on planarity for sub-0.5-um CMOS technology

Yota, Jiro, Brongo, Maureen R., Dyer, Thomas W., Rafftesaeth, Kenneth P., Bondur, James A., Chen, Ih-Chin, Sasaki, Nobuo, Patel, Divyesh N., Dixit, Girish A.

Year:

1996

Language:

english

File:

PDF, 490 KB

english, 1996

9

SPIE Proceedings [SPIE 23rd Annual International Symposium on Microlithography - Santa Clara, CA, United States (Sunday 22 February 1998)] Advances in Resist Technology and Processing XV - Etch integration issues in the development of deep submicron contacts utilizing DUV resist and organic BARC

Ramanathan, Viswanathan, Chen, Shixiong, Lai, Kafai, Brongo, Maureen R., Samarakone, Nandasiri

Year:

1998

Language:

english

File:

PDF, 3.38 MB

english, 1998

10

Synthesis and characterization of porous polymeric low dielectric constant films

Yuhuan Xu, D. W. Zheng, Yipin Tsai, K. N. Tu, Bin Zhao, Q. Z. Liu, Maureen Brongo, Chung Wo Ong, Chung Loong Choy, George T. T. Sheng, C. H. Tung

Journal:

Journal of Electronic Materials

Year:

2001

Language:

english

File:

PDF, 495 KB

english, 2001

11

SPIE Proceedings [SPIE Microelectronic Manufacturing - Santa Clara, CA (Monday 18 September 2000)] Challenges in Process Integration and Device Technology - Thickness-dependent optical and dielectric behaviors of low-k polymer thin films

Kim, Hyungkun, Shi, Frank G., Zhao, Bin, Brongo, Maureen R., Burnett, David, Kimura, Shin'ichiro, Singh, Bhanwar

Year:

2000

Language:

english

File:

PDF, 189 KB

english, 2000

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